Description
Non-Contact Resistance Measurement
| Main Features: | |
| 1. Easy to operate. 2. High accurate result. 3. Whole wafer mapping. | |
| Standard Certification: | |
| Application: | |
| 1.Semiconductor - EPI metrology 2.Compound - EPI metrology | |
| Specification: | |
| 1.Measurement range: 0.0015~6,500 Ωcm(special set up to 25,000 Ωcm) 2.Wafer thickness:650um 3.Repeatability: Typical <0.5% 4.Linearity<0.5% 5.Thickness:100um~1,900um 6.Tool to tool:<1% 7.Conductivity type(option):10mΩcm~1000Ωcm | |