Description
For LED, Compound, Semiconductor laser mark.
Main Features:
- For mulity material such as SiC, GaN( GaAs, Si).
Standard Certification:
- Company obtained certificates of ISO 9001, 14001, 18001
- Products obtained certificates of SEMI S2
Application:
- Easy operation
- Saving history
- Applicable marking, high quality marking.
Specification:
- Nd:YLF(THG) laser wavelength 349nm
- SEMI-OCR(Dot, Engraving)
- Throughput:70pcs/h
- Wafer size:4,5,6.(option 3, 8 inch)
- Input power supply required:AC200V± 20V,15A,single phase ,50/60Hz
- Vacuum utility:-77±10kPa, 0.01m2/min